Flow medium: Please note that ZFM Mass Flow Meters are designed to work only with clean gases. Never try to measure flow rates of liquids with any ZFM

Calibrations: Performed at standard conditions [14.7 psia (101.4 kPa) and 70 °F (21.1 °C)] unless otherwise requested

Environmental (per IEC 664): Installation Level II; Pollution Degree II

Flow accuracy (including linearity): ±(0.5% RD + 0.2% FS) based on actual calibration (at calibration temperature and pressure)

Repeatability: ±0.15% of full scale

Flow temperature coefficient: 0.05% of full scale/ °C or better

Flow pressure coefficient: 0.01% of full scale/psi (6.895 kPa) or better

Flow response time: 1000ms time constant; approximately 2 seconds to within ±2% of set flow rate for 0% to 100% of full scale flow

Maximum pressure: 1000 PSIG (6894 kPa gauge)

Gas and ambient temp: 32 °F to 122 °F (0 °C to 50 °C)

Relative gas humidity: Up to 70%

Connections: Standard 1/2" compression fittings

CE compliance: EMC Compliance with 2004/108/EC as amended. CISPR 11. Emission Standard: IEC 61000-6-3. Immunity Standard: IEC 61000-6-1

Datasheet

Manual