Brooks Instrument 5850EM Gas Mass Flow Controllers & Meters (0–3 sccm ~ -30,000 sccm)

Performance:

Flow Ranges: Any range from 0-3 sccm to -30,000 sccm Nitrogen eq. Lower flows available, consult factory

Control Range: 2 - 100% with elastomeric valve seat 3 - 100% with metal or Teflon® valve seat 

Repeatability: 0.25% of rate

Accuracy: 1% full scale including linearity, at calibration conditions 1.5% full scale including linearity, for flow ranges > 20 slpm

Settling Time: < 3 seconds to within 2% of full scale of final value for a 0 - 100% command step with normally closed valve

Mounting Attitude Sensitivity: Available in any position 0.5% max. full scale deviation after rezeroing

Temperature Sensitivity: Zero: < ±0.075% full scale per ˚C; Span: < ±1.0% full scale shift over 10 - 50 ˚C range

Pressure Sensitivity: 0.008% per psi Nitrogen 

Ratings:

Operating Pressure: 1,500 psi (10,342 MPa) max.

Differential Pressure Valve orifice sized for any pressure drop between 5 - 50 psi

(minimum pressure drop depends on gas and range - consult factory)

Ambient Temperature Limits:

Operating: 40˚F to 150˚F (5˚C to 65˚C)

Non-operating: -13˚F to 212˚F (-25˚C to 100˚C) 

Leak Integrity: Inboard to outboard 1x10-10 atm. cc/sec He max.

Electrical

Electrical Connections: 15-pin D-Connector (DA-15P)

Command Input: Voltage Option: 0 - 5 Vdc (input resistance 40 k ohm min.)

Output Signal: Voltage Option: 0 - 5 Vdc into 2,000 ohms minimum

5 Volt Reference Output: 5 Volts. ± 0.01 Vdc into 2,000 ohms minimum

Power Requirements: Voltage Option: N.C. Valve (or N.O. Valve with less than 2.5 slpm); 3.25 watts max; +15 Vdc @ 35 mA - 15 Vdc @ 180 mA N.O. Valve with flow rate greater than 2.5 slpm: 10.5 watts max., +15 Vdc @ 350 mA, -15 Vdc @ 350 mA

Power Supply Sensitivity: None within ±5% of specified voltage

EMC Directive (89/336/EEC): Per 61326

Mechanical

Process Connections: 1/4" Tube VCR

Materials of Construction: 316L VAR (Vacuum Arc Remelt), 316L, and high alloy ferritic stainless steel

External Seals: Nickel 200

Internal Seals: Nickel 200

Valve Seat: 316L, Viton® fluoroelastomers, Buna-N, Kalrez® or Teflon®

For more details, see datasheet.

Datasheet

User Manual