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Performance
F.S. Flow Ranges: 4 sccm - 25 sccm
Flow Accuracy: ±1% S.P. >35 - 100%,
±0.35% F.S. 2 - 35%
Repeatability & Reproducibility: 5 - 100% = ±0.15% of S.P.
2 - 5% = ±0.015% of F.S.
Response Time (Settling Time) N.C. Valve: < 3 sec
Control Range: 2 - 100% (Normally Closed Valve)
Valve Shut Down (N.C. Valve): Standard Hastelloy Valve: <1% of F.S.
Zero Stability: <+0.6% F.S. per year
Temperature Coefficient: Zero: 0.005% F.S. per °C; Span: 0.05% F.S. per °C
Ratings
Operating Temperature Range: 10 - 50°C
Differential Pressure Range: 10 Torr - 30 psid
Maximum Operating Pressure: 500 psia max
Proof Pressure: 700 psia max
Design Pressure: 800 psia max
Burst Pressure: 3000 psia max
Leak Integrity (External): 1x10⁻¹⁰ atm. cc/sec He
For more details, see datasheet.
