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Digital Communications I/O: Profibus (5-pin female M12, M20x1.5 conduit)
Mechanical Connection: 12 mm tube compression
Valve Type: Normally closed (Pressure diff.>30 psig (2 bar))
Analog Communications I/O: None
Revision Level: RevB
Performance:
Full Scale Flow Range (N2, Eq. 0ºC Ref): 100 - 1100 slpm/ 1100-2500 slpm
Flow Accuracy—17025 Certified Devices: ±0.6% of S.P. (20 - 100% F.S.), ±0.12% of F.S. (<20% F.S.)/ ±0.6% of F.S
Flow Accuracy: ±0.9% of S.P. (20 - 100% F.S.), ±0.18% of F.S. (<20% F.S.)/ ±1.0% of F.S.
Control Range N2, eq.: 100:1 for F.S. from 1 - 50 slpm (50:1 for all other F.S. flows)
Repeatability & Reproducibility: 0.20% S.P
Linearity: Included in accuracy
Response Time: <3 second
Zero Stability: <+0.2% F.S. per year
Temperature Coefficient: Zero: <0.05% of F.S. per °C Span: <0.1% of S.P. per °C
Attitude Sensitivity: <0.2% F.S. maximum deviation from specified accuracy after re-zeroing
Ratings
Operating Temperature Range: (-14) - 65°C (7 - 149°F)
Minimum Pressure Differential: Min.: 7.5 psi / 0.52 bar at 500 lpm
Min.: 14.5 psi / 1.00 bar at 1000 lpm
Min.: 35.0 psi / 2.41 bar at 2500 lpm
Maximum Pressure Differential: Application specific up to 1500 psi / 103.4 bar
Leak Integrity: 1x10^-9 atm. cc/sec He
Valve Shut Down: <1% of F.S. standard; improved shut off available with Biotech package
For more details, see datasheet.
