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ESDEMC ES62X-CMPS Compact Manual Probe Station

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ES62X-CMPS-TSM Trinocular Stereo Microscope

• Magnification range: 3.5x - 90x

• Zoom objective power: 0.7x - 4.5x

• Eyepieces (DIN, 30mm): WH10x20mm dB

• Trinocular port: C-Mount or 23mm dB

• Field of view: 2-1/2 inch

• Optical working distance: Up to 8 inch

• Microscope stand: Double-arm boom stand

• Head movement: X-, Y-, and Z-axes

• Illumination type: Episcopic (reflected)

• Light source: LED ring light with rheostat mm

• Power: 110 - 240 V

• Dimensions: 540 x 480 x 460 mm

• Weight: 25 kg

ES62X-CMPS-WPS Wafer Probe Station

• Wafer Chuck diameter: 170 mm up to 300 mm

• Wafer Chuck Material: Stainless Steel

• Wafer Chuck Bias: 4 mm connector

• Dimensions: 500 X 300 X 100 mm

• Weight: About 14 kg

ES62X-CMPS-MVP Miniature Vacuum Pump

• Attainable Vacuum: -333 mbar

• Free Air Displacement: 7 l/min

• Inlet O.D.: 6 mm

• Outlet O.D.: 6 mm

• Rated Voltage: 120 VAC

• Power Consumption: 14 W

• Life Expectancy: 3000 h

• Dimensions: 90 X 90 X 100 mm

• Weight: 1 kg

ES62X-CMPS-PCB Magnetic Flexible PCB Holder for Probe Station

• Max PCB size: 180 X 130 X 2 mm

• Dimensions: 215 X 180 X 100 mm

• Weight: About 14 kg

Datasheet



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