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Measuring range (XxYxZ): 500×400×200mm
Stage size: 750×600mm
Glass stage size: 550×450mm
Resolution of X/Y/Z axis: 0.5µm
Accuracy of X/Y axis: ≤(2.5+L/200)µm (L is the measuring length in mm)
Repeatability: 2μm
Objective: 0.6X~8.0X (13.3:1 continuous zoom ratio)
Working distance: 83mm
View field (diagonal length): 0.81~10.72mm
Magnification: 27X–356X (on 23.8" monitor)
Camera: 1/1.2" color CCD, 2.3M pixel
Max. height of workpiece: 200mm
Illumination (surface): coaxial light, three-ring eight-zone adjustable ring light
Illumination (contour): adjustable LED light
Operation system: Windows 10/11
Max. weight of workpiece: 35kg
Drive method: automatic
Environmental requirement: temperature: 20°C±5°C, relative humidity: 20%~80%, vibration: <0.002g, less than 15Hz
Power supply: 190~230V, 50Hz, 1500W
Dimension (L×W×H): 900×1300×1800mm
Net weight: 550kg
