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Full Scale Flow Range: 2-20 sccm (SDS materials)
10-1000 sccm (other materials)
(N2 equivalent)
Maximum Inlet Pressure: 5 psig
Control Range: 5% to 100% of Full Scale
Typical Accuracy: Gas/flow rate dependent
Repeatability: ± 0.2% of Full Scale
Resolution: 0.1% of Full Scale
Zero Temperature Coefficient: <0.02% of Full Scale/°C
Span Temperature Coefficient: <0.2% of Rdg./°C
Warm-up Time: 30 minutes
Typical Settling Time: <5 sec
Operating Temperature: 0° to 50°C
Power Requirements: ± 15 VDC (± 5%) @ 200 mA
Flow Input Output Signal: 0 to 5 VDC into >10K Ω
Wetted Materials: 316L S.S., nickel, Inconel®
Fitting Type: Swagelok® 4 VCR®
Compliance: CE
For specific range please check the attachment below!
