MKS DI-CO2 Dissolved Carbon Dioxide Ultrapure Water Delivery System (1 - 3 barg)

Flow Rate: Minimum total flow: 0.5 L/min (0.1 gpm)

Maximum total flow: 90 L/min (15.8 gpm)

Communication: Binary in/out (dry contacts), RS232, analog out, USB

Accuracy: Typical maximum deviation from set point:

+ Steady state flow: ±3%

+Fluctuating flow: ±10% for flow changes <4 L/min per sec

UPW Temperature Range: 20 - 50°C

Outlet Pressure: 1.0 - 3.0 barg (0.1 - 0.3 MPag, 14.5 - 43.5 psig), depending on UPW supply pressure

Conductivity/Resistivity Range:

- Minimum conductivity 5 µS/cm, max. resistivity 200 kOhm*cm

- Maximum conductivity 50 µS/cm, min resistivity 20 kOhm*cm

Plumbing Materials: Liquid contacted surfaces: PFA, PVDF

Cabinet Material: PVDF or C-PVC or FRPP

Dimensions: 386 x 650 x 232 mm (WxHxD)

Weight: 17.3 kg

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