Trek 640 Electrostatic Chuck Optimizer
ManufacturerTREK(View more products from this manufacturer)
Model640
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Output Voltage Range: 0 to ± 2 kV
Output Current Range (mA): 0 to ± 5
Voltage Monitor Scale Factor: 1 / 200 V
Voltage Monitor DC Accuracy (%): 0.1
Offset Voltage / Zero Offset Voltage: < 5 mV
Current Monitor Scale Factor: 1 V/mA
Current Monitor DC Accuracy: 0.01
Output Noise (mV): < 10 rms
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