Advanced Energy APEX 3kW RF Plasma Generator (3kW,13.56MHz)

- Frequency: 13.56 MHz
- RF Output Power and Regulation
Forward Delivered (Fwd/Del) Power Into a 50 Ω Non-Reactive Load: 3 kW
Fwd/Del Power (2:1 VSWR): 2000 W
Fwd/Del Power (3:1 VSWR): 1500 W
Harmonics: All full-rated output, -40 dBc forward/load when operated into a 50 Ω
non-reactive load
- Output Accuracy
Forward Power Regulation: ±1% of set point or ±0.1% full-rated output power, whichever is greater, when measured into a 50 Ω non-reactive impedance
Load Power Regulation: ±3% of the load power into a 3:1 VSWR non-reactive load
- Ambient operating temperature: 5°C (41°F) min, 40°C (104°F) max
- Water coolant temperature: 35°C (95°F) max
- Dimensions (Including rear connections):
132.59 mm (H) x 215.14 mm (W) x 425.96 mm (D)
5.22" (H) x 8.47" (W) x 16.77" (D)

Datasheet