Get exclusive volume discounts, bulk pricing updates, and new product alerts delivered directly to your inbox.
By subscribing, you agree to our Terms of Service and Privacy Policy.
Direct access to our certified experts
Performance
Full Scale Flow Range: 3 sccm to 50,000 sccm F.S. N2 Equivalent
Process Gas Flow Accuracy:
Zero Leak Valve: <±1% S.P. (5 – 100% F.S.); <±0.05% F.S. (0.5 - 5% F.S.)
Metal Seal Valve: <±1% S.P. (5-100% F.S.); <±0.05% F.S. (2-5% F.S.)
Control Range: 0.5 - 100% F.S; 2 - 100% F.S.
Repeatability & Reproducibility:
5-100% = ±0.15% of S.P.; 0.5-5% = ±0.015% of F.S
5-100% = ±0.15% of S.P.; 2-5% = ±0.015% of F.S
Transient Response & Flow Settling Time: 280 ±20 ms Matched Transient Response, for any ascending or descending non-zero setpoint
(Fast Response Option available via Customer Special Request.)
Valve Leak-by: Zero Leak Valve: <0.005% of F.S. of the bin (Bins 42-46); <0.02% of F.S. of the bin (Bins 40-41) (@ 45 psia to VAC
Metal Seal Valve: <0.15% of F.S. of the bin; (@ 45 psia to VAC)
Supply Pressure Insensitivity/Cross-Talk: <±1% S.P. up to 40 psi/sec inlet pressure spike
Steady State Back Pressure Insensitivity: Insensitive to steady state back pressure
Dynamic Back Pressure Insensitivity: Maintains accuracy during disturbance from vacuum to 1200 Torr over a period of 1 sec
Zero Stability: <±0.15% F.S. per year
Temperature Coefficient:
Zero: 0.005% F.S. per °C
Span: 0.05% S.P. per °C
Number of Standard Configurations: Nine (9) standard bin ranges
Dynamic Gas and Range Programmability: Device may be configured via single tool command in less than 1 second or via BEST software with independent USB diagnostic port
Attitude Insensitivity: Insensitive to device orientation after re-zeroing
Ratings:
Operating Temperature Range: 10 – 60°C
Operating Inlet Pressure:
<15 psia for Low Pressure (LP) bins, configurable based on application
15 to 30 psia
25 to 40 psia
35 to 50 psia
45 to 60 psia
Operating Outlet Pressure:
Vacuum to Atmosphere
Up to 1200 Torr for some applications
Differential Pressure Range:
Min: 7 psid typical
Max: up to 50 psid
External Leak Integrity: 1 x 10^-10 atm cc/sec He
Proof Pressure:
100 psia, CT Bin Devices (70 psia for Helium and Helium mixtures on CT Bin Devic)
45 psia, LP Bin Devices
Design Pressure: 150 psia
Burst Pressure: 1000 psia
For more details, see datasheet.
