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Digital Communications I/O: EtherCAT
Mechanical Connection : 1/2” VCR
Valve Type: None
Analog Communications: None
Revision Level: RevB
Performance:
Full Scale Flow Range (N2, Eq. 0ºC Ref):100-1100slpm>1100 - 2500 slpm
Flow Accuracy—17025 Certified Devices: ±0.6% of S.P. (20 - 100% F.S.), ±0.12% F.S. (<20% F.S./ ±0.6% of F.S
Flow Accuracy: ±0.9% of S.P. (20 - 100% F.S.), ±0.18% of F.S. (<20% F.S.)/ ±1.0% of F.S
Control Range N2, eq.: 100:1 for F.S. from 1 - 50 slpm (50:1 for all other F.S. flows)
Repeatability & Reproducibility: 0.20% S.P
Linearity: Included in accuracy
Response Time (Settling Time within ±2% F.S. for 0 - 100% command step): <3 second
Zero Stability: <+0.2% F.S. per year
Temperature Coefficient Zero: <0.05% of F.S. per °C Span: <0.1% of S.P. per °C
Pressure Coefficient: ±0.03% per psi (0 - 200 psi N2)
Attitude Sensitivity: <0.2% F.S. maximum deviation from specified accuracy after re-zeroing
Ratings:
Operating Temperature Range: (-14) - 65°C (7 - 149°F)
Minimum Pressure Differential (Controllers): 7.5 psi / 0.52 bar at 500 lpm
Maximum Pressure Differential (Controllers): 290 psi / 20.0 bar
Leak Integrity (External) 1x10⁻⁹ atm. cc/sec He
Valve Shut Down (Leak-by)7 <1% of F.S. standard; improved shutoff available with Biotech package
For more details, see datasheet.
