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No. of Chambers: 2 (1 Process Chamber and 1 Pass Chamber)
Nominal Size Main Chamber (Width): 2000 mm
External Dimensions (W x D x H):
With Pod Flange:
With BIBO: 2000 mm x 780 mm x 3000 mm
Without BIBO: 2000 mm x 780 mm x 2600 mm
With Adjustable Base Stand (Min):
2000 mm x 780 mm x 2300 mm
With Adjustable Base Stand (Max):
2000 mm x 780 mm x 2700 mm
Without Pod Flange:
With BIBO: 2000 mm x 695 mm x 3000 mm
Without BIBO: 2000 mm x 695 mm x 2600 mm
With Adjustable Base Stand (Min):
2000 mm x 695 mm x 2300 mm
With Adjustable Base Stand (Max):
2000 mm x 695 mm x 2700 mm
Internal Dimensions (W x D x H): 1992 mm x 630 mm x 842 mm
Chamber Sheet Metal: Stainless Steel Type 316L (interior), Stainless Steel Type 304 (exterior)
Filter Type: ULPA filter (U15)
Support Frame & Service Housing: Stainless Steel Type 304
Chamber Environment: ISO Class 5 (Grade A)
Airflow Type: Turbulent
Lighting Intensity: ≥ 500 Lux (≥ 47 foot-candles)
Noise Level: ≤ 65 dBA
Electrical Requirement: AC 230-240 V, 50/60 Hz, 1 Ph, 25A
