Get exclusive volume discounts, bulk pricing updates, and new product alerts delivered directly to your inbox.
By subscribing, you agree to our Terms of Service and Privacy Policy.
Direct access to our certified experts
Flow range: 50 SLM
Gases: Ar
Valve type: NC: Normally close
Flow rate control range: 5-100％ F.S
Accuracy: ±2％ F.S [※±1％ F.S Compatible]
Setting signal: 0.25-5VDC
Output signal: 0-5VDC
Repeatability: ±0.2％ F.S
Response: ≦10sec
Operating differential pressure: 200-300kPa
Pressure resistance: 1MPa(G)
Operating temperature: 5-50℃, ≦85％RH (Scope of accuracy guarantee : 15-35℃)
Leak integrity: 1×10-7Pa･m3/sec He
Drive power source: +15VDC: 60mA, -15VDC: 150mA
Communication: Analog 0-5VDC
Wetted surface material: SUS316L, PTFE, Fluoro-Rubber
Seal material: Fluoro-Rubber
Actuator system: Thermal
Standard fitting: 1/4in.SWL
Accessory: User's manual, Written Guarantee
