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Flow range: 50 SLM
Gases: He
Valve type: NC: Normally close
Flow rate control range: 5-100％ F.S
Accuracy: ±2％ F.S [※±1％ F.S Compatible]
Setting signal: 0.25-5VDC
Output signal: 0-5VDC
Repeatability: ±0.2％ F.S
Response: ≦10sec
Operating differential pressure: 200-300kPa
Pressure resistance: 1MPa(G)
Operating temperature: 5-50℃, ≦85％RH (Scope of accuracy guarantee: 15-35℃)
Leak integrity: 1×10-7Pa･m3/sec He
Drive power source: +15VDC: 60mA, -15VDC: 150mA
Communication: Analog 0-5VDC
Wetted surface material: SUS316L, PTFE, Fluoro-Rubber
Seal material: Fluoro-Rubber
Actuator system: Thermal
Standard fitting: One touch fittings
Accessory: User's manual, Written Guarantee
