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Resolution: 5 nm (SE)
Magnification: Max. 150,000x
Voltage: 1kv ~ 30kv (1/5/10/15/20/30)
Detection: SE (Secondary Electron)
Electron Gun: Tungsten Filament (cartridge)
Sample stage: X, Y : 40mm, R: 360° Z: 0~50mm, T: -15~90°
- 5-axis (Fully Motorized)
Sample (Diameter/Height): 80mm/50mm
Vacuum System: High Vacuum
