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Max. Load Capacity: 200 kg
Axis Travel (X×Y×Z): 140 × 140 × 65 mm
Speed: 0.1 ~ 200 mm/min
Min. Travel Distance of Z-Axis: 0.25 μm
Plate Dimension: 230 × 230 mm
Accuracy of Force: ±0.1% FS
Resolution of ADC: 24-bit
Sampling Frequency: 5000 Hz
Vacuum Supply: 0.4 ~ 0.6 MPa, Flow Rate: ≤15 L/min
Power Supply: AC 220V, 50Hz, 2KW
Dimension (W × D × H): 680 × 617 × 685 mm
Weight: 100 kg
