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Measuring range (XxYxZ): 500x300x200mm
Stage size: 800x490mm
Glass stage size: 550x350mm
Resolution of X/Y/Z axis: 0.4µm
Accuracy (vision): ≤(2+L/200)µm (L is the measuring length in mm)
Accuracy (probe): ≤(3+L/200)µm (L is the measuring length in mm)
Repeatability: 1.5µm
Objective: 0.7X~4.5X (zoom)
Working distance: 55mm
View field (diagonal length): 1.3~7.9mm
Magnification: 36X-210X (on 21.5" monitor)
Camera: 1/2" color CCD, 2M pixel
Illumination
contour: coaxial light, programmable segmented ring light
surface: adjustable LED light
Max. height of workpiece: 195mm
Max. weight of workpiece: 35kg
Operation system: Windows 10/11
Drive method: automatic
Power supply: 220V, 50/60Hz
Dimension (LxWxH): 1650x1120x1780mm
Weight: 580kg
■ Motorized zoom objective
■ Can import 3D drawings
■ Vision mearsurement and probe mearsurement can be used in the same program
■ Granite platform, column and stage, more stable
■ Double close-loop motion control, with precise positioning performance in
high-speed movement
■ Panasonic servo control motor
■ 40 independent surface light source, 200-step adjustment
■ Servo motors for X, Y, Z axis
Datasheet
