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Cylinder diameter (mm): 510
Dimensions (mm) X: 905; Y: 1140; Z: 2195
Dimensions (mm) X: 1120; Y: 1300; Z: 2195
Air accuracy (precision type): (2.5 +0.4L/100) µm
Spatial accuracy (ordinary type): (3.0 +0.4L/100) µm
Resolution: 0.5um
Using temperature range: 0 -45℃
Workbench: Marble platform
Maximum speed (precision type): 500mm/sec
Maximum speed (LM type): 400mm/sec
Maximum acceleration (precision type): 750mm/sec
Maximum acceleration (LM type): 650mm/sec
