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Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
Accuracy：±1～1.5%F.S.
Fitting: 1/4 SWL type
Fluid: N2
Full-scale flow rate: 500SCCM
Calibration temperature: 20°C
Settling Time: Within 98%F.S., 2 seconds
Accuracy Within: ±1.0%F.S.(25℃)
Repeatability Within: ±0.5%F.S.
Control Range: 2 – 100%
Differential Pressure:
50kPa – 300kPa(F.S. 10SCCM - 5SLM)
100kPa – 300kPa(F.S. 10SLM - 20SLM)
Pressure Resistance: 980kPa
Leak Integrity 1 x 10^-8 Pam3/s He
Ambient Temperature Within: 5 – 45℃ (Accuracy warranty:15 –35℃)
Storing Temperature: 60℃(Max.)
Command Input: 0.01- 5VDC(Valve is fully closed at setting input of F.S.2% or less).
Output Signal: 0 – 5V DC
Power Supply Sensitivity: +15V DC 100mA ; -15VD 200mA
Valve Type: Normally-closed type (Solenoid)
Configuration material: SUS316,SUS316L, VITON,TEFLON
