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Measuring principle: Stylus method
Probe: BFW skidless system with MarSurf SD 26 drive unit and/or PHT skidded system with MarSurf RD 18 drive unit
Measuring range: +/– 250 µm (up to +/– 750 µm with 3x probe arm length) applies to BFW system350 µm applies to PHT probe system
Filter according to ISO/JIS: filter as per ISO 16610– 21(replaced Gaussian filter as per ISO 11562), robust Gaussian filter a per ISO 16610– 31
Number n of sampling length according to ISO/JIS: 1 to 50 (default: 5)
Traversing lengths: MarSurf GD 26 / SD 26: Automatic; 0.56 mm*; 1.75 mm; 5.6 mm; 17.5 mm, 56 mm,Measurement up to stop, variable* Traversing length dependent on drive unitRD 18: Automatic; 1.75 mm; 5.6 mm; 17.5 mm
Measuring force: 0.75 mN
Surface parameters: Over 80 surface parameters for R, P and W profiles according to current ISO/JIS or MOTIF standards (ISO 12085)
General software options:
Dominant waviness (WDc) for MarWin
ISO 13565-3 surface parameters
QS-STAT / QS-STAT Plus
Profile processing
User defined parameters between operator and authorized personnel
Contour 1 for MarSurf XR 1 / XR 20 (in conjunction with MarSurf SD 26 drive unit)
All options on one MLK
Software options:
Option RoughnessPlus
Option MeasurementPlus
Digital I/O set
