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Measuring range (X × Y × Z): 15.75"x15.75"x9.84"(400 × 400 × 250mm)
Variable magnification unit: Programmable Power Turret 1X, 2X, 6X
Resolution / scale unit: 0.1μm / reflective-type linear encoder
CCD camera: B & W
Illumination unit:
Vertical reflected stage light: White LED
Coaxial: White LED
Programmable Ring light: White LED
Measuring accuracy:
E1 X / Y axes: (0.8+2L / 1000) μm
E1 Z axis: (1.5+2L / 1000) μm
E2 X-Y plane (1.4+3L / 1000) μm
LAF repeatability: σ : 0.4μm
Maximum stage loading: 88lbs.(40kg)
Mass of main unit (including mounting stand): 1,276lbs.(579kg)
Optional accessories:
Laser Auto Focus
Rotary Index
