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Measuring range [mm]:
+ Vision: 16x16x10" (400×400×250)
+ Common to vision touch probe: 11x16x10" (276×400×250)
Observation unit*: Programmable power turret 1X-2X-6X
Illumination unit:
+ Contour illumination: White LED
+ Surface illumination: White LED
+ PRL : White LED
Resolution of scale [µm]: 0.1
Vision measuring accuracy [µm]:
+ EUX/EUY, MPE: (1.5 + 3L/1000)
+ EUXY, MPE: (2.0 + 4L/1000)
+ EUZ, MPE: (1.5 + 4L/1000)
Displacement sensor measuring accuracy [µm]*2: E1Z: (1.5 + 4L/1000)
Temperature compensation function: Manual
