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Measuring range (X × Y × Z): 15.75"x15.75"x9.84"(400 × 400 × 250mm)
Variable magnification unit: Programmable Power Turret 1X, 2X, 6X
Resolution / scale unit: 0.1μm / reflective-type linear encoder
CCD camera: B & W
Illumination unit:
Coaxial: -
Stage Light: -
Vertical reflected: Color LED
Contour: White LED
Programmable Ring light: Color LED
Measuring accuracy:
E1 X / Y axes: (0.8+2L / 1000) μm
E1 Z axis: (1.5+2L / 1000) μm
E2 X/Y axis: (1.4+3L / 1000) μm
TP: E, X-Y-Z plane: (1.7+3L / 1000) μm
QV Objective lenses: 2.5 QV-HR 2.5x QV-SL2.5x
LAF repeatability: σ : 0.4μm
Stage glass size: 12.41"x21.69"(493 × 551mm)
Maximum stage loading: 66 lbs.(30kg)
Dimensions of main unit: 40.43"x55.39"x70.00"(1027×1407×1778mm)
Mass of main unit (including mounting stand): 1,276 lbs.(579kg)
Optional accessories:
Laser Auto Focus
Rotary Index
