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Measuring range (X × Y × Z): 23.62"x25.59"x9.84"(600 × 650 × 250mm)
Variable magnification unit: Programmable Power Turret 1X, 2X, 6X
Resolution / scale unit: 0.1μm / reflective-type linear encoder
CCD camera: B & W
Illumination unit:
Coaxial: -
Stage Light: -
Vertical reflected: Color LED
Contour: White LED
Programmable Ring light: Color LED
Measuring accuracy:
E1 X / Y axes: (1.5+3L / 1000) μm
E1 Z axis: (1.5+4L / 1000) μm
E2 X/Y axis: (2.0+4L / 1000) μm
TP: E, X-Y-Z plane: (1.8+3L / 1000) μm
QV Objective lenses: 2.5 QV-HR 2.5x QV-SL2.5x
LAF repeatability: σ : 0.4μm
Stage glass size: 27.44"x29.84"(697 × 758mm)
Maximum stage loading: 110 lbs.(50kg)
Dimensions of main unit: 51.54"x78.15"x70.63"(1309×1985×1794mm)
Mass of main unit (including mounting stand): 3,197lbs.(1450kg)
Optional accessories:
Laser Auto Focus
Rotary Index
