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Ozone Output: up to 425 g/Nm3
Flow Rate: 2.5 - 50 slm
Feed Gas: O2 Grade 6 or better, or N2 100 ppm Grade 5 or better (optional)
Ambient Temperature: 10 - 40°C (50 - 104°F)
Nominal Cell Pressure (Delivery): 15 - 45 psig (100 - 310 kPa)
Pressure: 20 - 50 psig
Control Interface: Front panel control and remote operation
Cooling Water Temperature: 5 - 25°C (41 - 77°F)
Cooling Water Filtration: 100 microns
Cooling Water Quality: Resistivity ≥ 50 kΩ/cm
Minimum Water Flow: 9.4 lpm (2.5 gpm)
Voltage Requirements: 208 VAC (±10%) 3Ø & GND, no neutral
Current Requirements: 20 Amp
Frequency: 50/60 Hz
Weight: 46.3 kg (102 lbs)
Dimensions: 483 x 445 x 267 mm (19.0 x 17.5 x 10.5 in)
Compliance: CE, SEMI S2-0302, SEMI F47, UL 61010-1, CAN/CSA-61010-1
