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Type: RPS-CM12P1 Remote Plasma Source
Power Output: 12 kW, 3 phase 50/60 Hz, 40 Amps RMS max phase
RF Frequency: 400 kHz
Accuracy: ±1% to power set point
Gas Supply During Ignition: Ar
NF3 Process Gas: 1-12 slm, 1-10 T
NF3 Operation Reactant Output: 1-12 slm
THD: >15%
Inlet Gas Connection: KF40
Outlet Gas Connection: KF50 or KF40
Control Interface: Analog: DB25
Digital: EtherCAT
Dimensions: 18.4 x 9.5 x 10.5 in. (46.73 x 24.13 x 26.67cm)
Weight: 73 lbs. (33.11 kg)
Compliance: SEMI F47
