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Travel: 20 µm
Length: 2.24" (57 mm)
Resolution(a): 5 nm
Capacitance: 3.6 µF
Feedback: Strain Gauge
Accuracy: +1%/-0%
Repeatablity: 0.7 µm
Included Cables:
- SMC Female to SMC Female, 3 m
- 9-pin D-Sub Male to 7-pin LEMO Female, 3 m
Recommended Controllers: BPC301, MPZ601, KPZ101/KSG101
Compatible Stages: OEM Applications
(a) Dependent on control electronics.
