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Power: 3KW
Furnace tube size(mm): Dia 60(OD) X1800mm
Dimension: 1800X410X610
Power supply voltage: 220V
Phase number: Single-phase
Control mode
1.Yudian temperature control: 30 sections can only use PID temperature regulation.
2.FP93 temperature control (from Japan)
Temperature control mode: Intelligent PID
Burnout protection and display: Yes
Over-temperature protection: Yes
Overcurrent protection: Yes
Control accuracy: +/- 1 ℃
Trigger: Phase-shift trigger
SCR: 106 / 16E Germany Simon Kang
The 1.2 temperature zone max temperature: 1200 ℃
The 1.2 temperature zone Rated temperature: 1150 ℃
Heating rate: ≤30 ℃ / Min (Available upon request modification)
Recommended heating rate: ≤15 ℃ / Min
Thermocouple Type: K type
The 1.2 temperature zone heating length: 205mm
Surrounding surface temperature: ≤45℃
Plasma RF Power
Power output range: 0-500W
Maximum reflected power: 10W
Signal frequency: 13.56MHZ ± 0.005%
Noise: <30 dB
Air cooling: cooling method
Input Power: 208-240V 50 / 60HZ
GX supply system main parameters
Standard range
Proton flow controller 5,10,20,30,50,100,200,300,500SCCM, 1,2,3,5,10SLM
(you can choose any scale)
Accuracy: ± 1.5%
Pressure drop: <0.01MPa
Repeatability: ± 0.2% F.S
Max Operating pressure: 3MP
VS-0.1 exhaust system
Power supply: 220V / 380V 380W
Pumping rate: 2L / S
Resistance vacuum gauge: ZDR-I
Vacuum measurement range: 0.1-10 5 Pa
Vacuum pump: VRD-8
Corrugated pipe: KF25X1000mm
Vacuum system: 10 -1Pa
