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Thickness range: 0.5 ㎛ – 100 ㎛
Wavelength range: 350 ㎚ – 1,050 ㎚
Spot size: Approximately 4 mm
Repeatability: <± 0.001 ㎛ at 1 ㎛ SiO2 on Si wafer
Light source: Tungsten halogen 1–6 W
Sample stage: 20 cm x 20 cm
Dimensions
Detector: 22 cm × 22 cm × 7 cm (H)
Light source: 12 cm x 17 cm x 5 cm (H)
Stage: 20 cm x 20 cm x 17 cm (pole H)
Weight: Approximately 5 kg
Power: 12 V / 1 A
Applications:
- Semiconductor
- Display
- Conductive oxides
- Protective coatings
- PCB coating process
- Parylene coatings
- Hard coatings
- Lens coatings
- Bio medical applications
- Adhesive coatings
- Polymer films (ex. PET)
- Thick photo-resists (ex.SU-8)
