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System: DP mode, Barrel type
High Frequency Output: Max. 200W
Oscillation Frequency: 13.56MHz
Tuning Method: Automatic
Reaction Chamber: Pyrex Glass φ100× L160mm
Reaction Gas System: 1 system (oxygen), flow meter
Control System: Manual leakage valve
Piping Material: SUS、Teflon
External Dimensions: W350×D400× H500mm (without projection）
Accessory: Specimen stand x 1pc
Internal dimensions（φ×D mm）: φ100×160mm
External dimensions（W×D×H mm）: 350×400×500mm
Power Source: AC115V/AC220V Single phase with step-down transformer
Weight: 25kg
