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Plasma Mode: DP/RIE
Oscillation Frequency: 13.56MHz
RF Power: 1,000
Stage Dimensions: 280W×280D mm Parallel flat stage
Reaction Gas: Mass flow control, 2 system + 1 for purge gas
Vacuum Pump: Included, Approx. 1,000L/min exhaust volume
Safety Device: Door switch, Interlock of side panel, Emergency stop switch, Overheat prevention device
Internal dimensions（W×D×H mm）: 400×400×380mm
External dimensions（W×D×H mm）: 700×800×1600mm
Power Source: AC220V~AC 415V 3-phase with step-down transformer
Weight: 1000kg
